I had a first interview online with the hiring manager to get to know each other. Afterwards I was invited to a final round on-site in Veldhoven which lasted 3 hours: first round I had to give a presentation of my work experience, within the entire R&D group, second round was only with the HR manager to get to know more about the group and work at ASML, last round was with two senior R&D engineers from the group where more technical/physics related questions were asked.